High Purity Chemical Liquid Valve

Suppresses the generation of particles and reduced footprint.

  • Body class 3 has been added.
  • Suppresses the generation of particles and reduced footprint!
  • The special structure allows for reduced impact when the valve is closed as well as particle generation suppression.
  • Reduced footprint (Compared to the existing model): Valve width reduced by 20%, Mounting pitch reduced by 45%
  • Applicable for applications requiring high pressure/high back pressure
  • Operating pressure: 0 to 0.5 MPa, Back pressure: 0 to 0.5 MPa (Improved by 66% compared to the existing model)
The special structure reduces the impact when the valve is closed. Suppresses particle generation
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